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Photonic Crystal Based Micro Mechanical Sensor in SOI Platform

Indira Bahaddur, Preetha Sharan and P. C. Srikanth

Pertanika Journal of Science & Technology, Volume 26, Issue 3, July 2018

Keywords: Photonic crystal (PhC), silicon-on insulator (SOI), micro pressure, stress, optical membrane, nano rods

Published on: 31 Jul 2018

Two-dimensional photonic crystals with nano-rod configuration integrated in a silicon-on insulator are analysed in this study. A photonic crystal waveguide suspended over a silicon substrate then weight can be applied on that substrate to change the displacement of substance and to measure sensitivity for pressure in terms of micro units. The overall objective of this work is to detect displacement, which indicates the force applied on the slab with photonic crystals that have line defects. Stress and displacement of the slab reveal the pressure applied. Stress is calculated by the power distribution/excitation in the slab. The displacement of the slab is due to the force, while pressure is determined by the photonic crystal sensor. The quality and sensitivity of the sensor are 1496 and 1200 RIU, respectively. The transmission spectrum is 0.1 micron to 0.5 microns shift, respectively, which are found to be distinct.

ISSN 0128-7680

e-ISSN 2231-8526

Article ID

JST-S0445-2018

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